Device and method for self-adjustment of a component-handling device for electronic components

ABSTRACT

A component-handling device for removing components from a structured component supply and for storing the removed components at a reception device, where the reception device is newly adjusted after being initially put into operation after the replacement of device components or after maintenance work, in order to comply with the precision requirements when handling the components. The component-handling device has a self-adjustment device which permits it to adjust the device efficiently in terms of time and with high precision without manual intervention by an operator. The self-adjustment device is composed of a multiplicity of optical sensors and a controller. Adaptation of the measurement results acquired by means of the optical sensors using position sensors and property sensors installed originally for component inspection during fabrication gives rise to a high degree of process reliability and at the same time permits device components to be inspected for damage.

CROSS-REFERENCE TO RELATED PATENT APPLICATIONS

This application is a National Stage application of InternationalApplication No. PCT/EP2016/072482 filed Sep. 22, 2016, which claimspriority to German Patent Application Serial No. DE 10 2015 013 495.7,filed Oct. 16, 2015.

BACKGROUND

There are described herein a device and a method for self-adjustment ofa component-handling device for electronic components.

This device and this method are explained in conjunction with acomponent-handling device, a reception device and an imaging sensor.

A component is here, for example, a (an electronic) semiconductorcomponent, also referred to as a “chip” or “die”. Such a componentgenerally has a prismatic form, a substantially polygonal, for examplequadrangular (rectangular or square), cross-section with a plurality oflateral faces as well as a top face and an end face. The lateral facesand also the two (lower and upper) end faces of the component aregenerally referred to as side faces hereinbelow. The component may alsohave a number of lateral faces other than four. A component may also bean optical component (prism, mirror, lens, etc.). Overall, a componentmay have any geometric shape.

From the operational practice of the applicant there are known so-calledpick-up and set-down devices in which components are picked up from acomponent table by means of a suction device or holding device andsubsequently deposited on a carrier or in a transport container or thelike. Before the component is deposited, an inspection of the componentusually takes place. For that purpose, images of one or more side facesof the component are recorded by one or more cameras and evaluated bymeans of automated image processing.

In order to meet the demands that are made in semiconductormanufacturing in terms of precision, an adjustment of the device forpicking up and setting down the components is necessary prior to initialoperation, after the replacement of device components or followingmaintenance work on the device.

To that end, the devices for picking up and setting down the componentsmust be measured and then adjusted in order to compensate formanufacturing and mounting tolerances. This is carried out by anoperator, who first visualizes the pick-up and set-down device with theaid of a microscope or a camera image and then measures and adjusts it.The method is extremely time-intensive, susceptible to errors inpractice and ties up highly qualified personnel. The greater thecomplexity of a device, in particular the greater the number ofindividual device components that have to be adjusted relative to oneanother, the greater the outlay in terms of time and the susceptibilityto error/inaccuracy of the adjustment.

SUMMARY

A component-handling device is to allow a precise adjustment to becarried out in a time-efficient manner.

This object is achieved by a component-handling device for removingprismatic components from a structured component supply and depositingthe removed components at a reception device which has an integratedself-adjustment device. A first turning device having a plurality ofpick-up elements is adapted to receive a component from the structuredcomponent supply at a dispensing point to turn the received componentthrough a first predetermined angle about its longitudinal or transverseaxis deposit point to feed. Position and property sensors associatedwith the first and second turning devices are adapted to detect positiondata of the first and second turning devices, position data ofcomponents situated at the pick-up elements, and/or properties ofcomponents situated at the pick-up elements, and to provide them to acontroller.

The controller is adapted to determine, by means of position andproperty sensors, in particular before the actual component transferoperation, in the course of a self-adjustment, for each transferposition in which the first and/or the second turning device receive ortransfer components, a correction vector for the first and/or the secondturning devices and/or for the deposit point, which correction vector ineach case counteracts the manufacturing and mounting inaccuracies of thecomponent-handling device determined in the course of theself-adjustment.

The controller is further adapted to rotate the first turning device ina controlled manner about a first axis by means of a first rotary drive,to move the first turning device in a controlled manner along the firstaxis by means of a first linear drive, to rotate the second turningdevice in a controlled manner about a second axis that is not collinearwith the first axis by means of a second rotary drive, and to move thesecond turning device in a controlled manner along the second axis bymeans of a second linear drive.

The correction vector determined by the self-adjustment is used by thecontroller of the component-handling device in component transferoperation to counteract the manufacturing and mounting inaccuracies ofthe component-handling device determined in the course of theself-adjustment by controlled movement and/or rotation of the turningdevices and/or of the deposit point.

The arrangement presented herein thus forms an integratedhandling/inspection device which permits automated self-adjustment.Imaging sensors inspect all or almost all the end and/or side face(s) ofa component and thereby also provide relevant data for the positioningof the manipulators (pick-up elements) and the reception points. Thisdevice thus forms a core part of a closed machine system with thenecessary process-related peripherals, for example for the provision ofthe components (for example wafer table) and component repository (forexample pocket or carrier tape). The component-handling device presentedhere takes components from a component supply (wafer) arranged, forexample, horizontally in the upper region of the component-handlingdevice by means of a stationary ejection unit. The component supplymoves relative to this stationary ejection unit in the plane. By meansof a needle or in a contactless manner (e.g. by means of a laser beam),the ejection unit causes the components to be released singly from thecomponent supply and picked up by a pick-up element. The ejectedcomponents are conveyed to a total of up to six or more inspectionprocesses and finally fed into reception points (pockets) of the pocketor carrier tape. The expressions reception point and (deposit) pocketare here used synonymously. Reject parts can thereby be discharged. Theoptical examination of the component integrated into the transferprocess is divided into a plurality of examination processes. It usesone or more imaging sensors to optically detect end and/or lateralface(s) of a component and also the positions of the pick-up elements atthe transfer/reception points. These imaging sensors are adapted toacquire in each case at least one image of one of the end and/or lateralfaces of a component in a plurality of examination processes. Thefeeding/transport of the components takes place while pick-up elementsof turning devices each hold a component. A held component passesthrough individual examination processes as it is being transported. Theacquired (image) data of the imaging sensors are also used forcoordinating the position control of the manipulators (pick-up elements)and of the reception points. The component feeder is adapted to feed acomponent along its path substantially continuously or cyclically. Forthe self-adjustment, the device uses at least partly the imaging sensorsprovided for component inspection in component transfer operation. Inaddition, additional imaging sensors can be provided which opticallydetect those regions of the device at which a component is transferredfrom one device part to another device part from at least two differentviewing angles. The controller is adapted to determine for everypossible transfer position of the first and the second turning device anup to 3-dimensional correction vector for each component transfer point,each of which correction vectors is used during operation of thecomponent-handling device to counteract the manufacturing and mountinginaccuracies of the component-handling device. The complete assemblygroup presented here functionally combines three aspects: handling,adjustment of the handling, and inspection. These three functions areinterwoven with one another for the rapid and precise qualitativeassessment of a plurality of sides (up to six or more) of the componentsas they are quickly removed in singularized form from the componentsupply and, when classified as good parts by the inspection, depositedprecisely at the reception point or points.

In a variant, the component-handling device has only a first turningdevice, which picks up the component from the delivery device at thedispensing point and feeds it to the deposit point, where it istransferred to a reception device.

In another variant, the component-handling device has two approximatelystar-or wheel-shaped turning devices which are preferably operated in aregulated manner and are arranged preferably substantially orthogonally(90° plus/minus up to) 15° relative to one another. The turning devicescould also have a rectangular shape. Each of these turning devicescarries a plurality of pick-up elements which are movable radiallyrelative to its axis of rotation in order to convey the components, eachfixed to a pick-up element, within a pivot angle between componenttakeover and transfer, to one or more processing stations forinspection, discharge of reject parts and optionally further stations.

In the component-handling device presented here, the star- orwheel-shaped turning devices carry the components on radially outwardfacing pick-up elements which are arranged on the (imaginary) peripheryof the two turning devices. This is in contrast to component-handlingdevices in which the pick-up elements of one or both turning devices areoriented in a coplanar manner or parallel to the axis of rotationthereof.

While a plurality of examination processes are mentioned above, this isnot intended to specify a chronological sequence or an order (first animage acquisition in a first examination process and then an imageacquisition in a further examination process). In fact, cases are alsoconceivable in which the opposite order is advantageous. Since aplurality of components may also be picked up simultaneously at each ofthe turning devices, depending on the number of pick-up elements on theindividual turning devices, the examination processes also take place atthe same time, although on different components.

The (upper/lower) end and/or (side) lateral face(s) of a component thatare detected by the imaging sensors in the individual examinationprocesses can be end and/or lateral faces of the component that differfrom one another.

One aspect of the optical examination provides that the component feederwith a component completes the component path substantially without oralmost without stopping. One or more end and/or lateral faces of acomponent are thereby detected by the imaging sensors as the componentis moving or during the minimal stoppage times. These images are thenevaluated by methods of image processing. A variant of this opticaldetection/examination provides that one or more color cameras or blackand white cameras are provided as the imaging sensors.

The imaging sensors can have one or more mirrors, optical prisms, lensesor the like.

The imaging sensors can have associated radiation or light sources. Eachsource can be adapted to emit light/radiation with a different spectralor wavelength range for illuminating at least a portion of thecomponent. The wavelength ranges can differ from one another, overlap orcoincide at least in part. For example, the light of the first lightsource can be red and the light of the second light source can be blue.However, the reverse association or a different wavelength pairing (forexample infrared and visible light) can also be chosen.

The light sources can each be switched on briefly by a controlarrangement at the time when the pick-up element with the component isin the respective detection region, so that the end and/or lateral facesof the component can be illuminated with a brief flash of light fordetection by the respective imaging sensor. Alternatively, permanentillumination can be used.

In a variant, the component-handling device has an associated deliverydevice which is adapted to deliver a component from the structuredcomponent supply to a pick-up element, correspondingly positioned by thecontroller, of the first turning device. This can be a component ejector(die ejector), which pushes the component through the wafer carrier filmby means of a needle, or a laser pulse generator, which purposivelycauses the adhesive of the component on the carrier film to melt. Thedelivery device has an associated position and/or property sensor whichis adapted to detect the position of the delivery device relative to thecomponent to be delivered and/or position data of the component to bedelivered and/or properties of the component to be delivered, and toprovide them to the controller for operation of the delivery device.

In a variant, this position and/or property sensor is adapted todetermine a position of a pick-up element of the first turning devicerelative to the delivery device and provide it to the controller for theself-adjustment of the component-handling device.

In a variant, the component-handling device is equipped with a receptiondevice, associated with the deposit point, for a component fed thereto.The reception device has associated position and/or property sensorswhich are adapted to detect position data of the component fed to thedeposit point, position data and/or properties of reception points inthe reception device and/or of the component situated therein, and toprovide them to a controller.

In a variant, the position and/or property sensors are adapted todetermine a position of the reception point relative to a pick-upelement of the second turning device and to provide it to the controllerfor the self-adjustment of the component-handling device.

The controller is adapted to rotate the reception device in a controlledmanner at least partly about a third axis containing the deposit pointby means of a third rotary drive. The controller can also be adapted tomove the reception device in a controlled manner at least partly alongan axis by means of at least a third linear drive. Finally, thecontroller can also be adapted to move a carrier guided by the receptiondevice in a controlled manner at least partly along one of the firstand/or second axes by means of a linear drive. This carrier serves topick up the components in singularized form.

In a variant, the pick-up elements of the first and/or second turningdevice in the component-handling device are adapted to be deployed andretracted in a controlled manner radially to the axis of rotation or thecenter of rotation of the respective turning device, and/or to besubjected to negative pressure and/or excess pressure in a controlledmanner in order to receive and deliver a component to be fed, and/or tobe immovable about their respective radial movement axis, or to berotated in a controlled manner through an angle of rotation about theirrespective radial movement axis.

In a variant of a component-handling device of this type, the pick-upelements of the first and/or second turning device are provided withassociated linear drives for radial deployment/retraction at thedispensing point, the transfer point between the first and secondturning devices. These linear drives engage with the correspondinglypositioned pick-up elements from outside the respective turning devicesand deploy or retract the respective pick-up element. In anothervariant, these linear drives only deploy the respective pick-up element,while a return spring retracts the respective pick-up element. In afurther variant, each of the pick-up elements has an associatedbidirectional or unidirectional radial drive.

In a variant of the component-handling device, valves provide each ofthe individual pick-up elements, individually and in the correctposition, with negative pressure and excess pressure in order to performthe following functions, freely or in a position-controlled manner: (i)suction of the component, (ii) holding of the component, (iii)deposition of the component with or without a controlled blow-off pulse,and/or free blowing-off of the component.

In a variant of the component-handling device, position and propertysensors are associated with the first turning device between thedispensing point and the transfer point and/or with the second turningdevice between the transfer point and the deposit point. These sensorsare adapted to detect position data and/or properties of the fedcomponent and/or position data for regulating the position of themanipulators (pick-up elements) and of the reception points, and toprovide them to the controller.

In a variant, these sensors are adapted to determine a position of apick-up element of the first turning device relative to a previouslydefined reference point and/or to determine a position of a pick-upelement of the second turning device relative to a previously definedreference point and to provide these relative positions to thecontroller for the self-adjustment of the component-handling device.

In a variant, the relative positions of the pick-up elements of thefirst and/or second turning device to the defined reference points arecompared with the relative positions of the pick-up elements relative toone another and/or to the delivery device and/or to the reception pointfor each pick-up element, in each case by the controller, in order tocheck the detection quality of the sensors and/or that the pick-upelements are free of damage.

In a variant of the component-handling device, at least some of theposition and property sensors are adapted to inspect at least one endface and/or one or more lateral faces of the fed component in order todetect the position data and/or properties thereof and provide them tothe controller.

In a variant of the component-handling device, at least one imagingproperty and/or position sensor is provided in the center of the firstturning device and/or in the center of the second turning device fordetermining properties and/or the position of a component to be receivedor for determining the position of reception points in the receptiondevice and/or of the component situated therein. Based on the propertydata and/or the position data of this sensor/these sensors, a correctioncan then be made by the controller in the event of property defectsand/or position errors of the component to be received or of thereception point. In a variant, the imaging position sensor(s) is/areadapted to perform an image acquisition between adjacent pick-upelements during the turning movement of the first or second turningdevice and to provide it to the controller in order to effectcorresponding correction movements of the ejection unit, the componentsupply or wafer, the turning devices and/or the reception device. Inanother variant, the ejection unit is stationary. In another variant,the imaging position and/or property sensor(s) positioned in the centerof the first/second turning device has/have a reflector arrangementwhich allows the ejection unit, the component supply or wafer, thepick-up elements of the first/second turning device and/or the receptiondevice to be detected indirectly while the turning devices are in aposition provided for the transfer of components (transfer position).

In a variant, the position and/or property sensor in the center of thefirst turning device is adapted to determine a position of a pick-upelement of the first turning device relative to the delivery device andto provide it to the controller for the self-adjustment of thecomponent-handling device.

In a variant there is provided in the center of the first turning devicea further position and/or property sensor which is adapted to determinea position of a pick-up element of the second turning device relative tothe position of a pick-up element of the first turning device and toprovide it to the controller for the self-adjustment of thecomponent-handling device.

In a variant, the position and/or property sensor in the center of thesecond turning device is adapted to determine a position of thereception point relative to a pick-up element of the second turningdevice and to provide it to the controller for the self-adjustment ofthe component-handling device.

In a variant there is provided in the center of the second turningdevice a further position and/or property sensor which is adapted todetermine a position of a pick-up element of the second turning devicerelative to the position of a pick-up element of the first turningdevice and to provide it to the controller for the self-adjustment ofthe component-handling device.

In addition or alternatively to these imaging property and/or positionsensors there can be provided property and/or position sensors, providedexternally relative to the first and second turning devices, fordetermining properties and/or the position of a component to be receivedor for determining the position of reception points in the receptiondevice and/or of the component located therein. Based on the propertydata and/or the position data of this sensor/these sensors, a correctioncan then be made by the controller in the event of property defectsand/or position errors of the component to be received or of thereception point. Independently of the inspection system described above,and for functional association with the handling system as a constituentpart, there can be arranged in the center of each of the two turningdevices an upwardly directed component supply camera (with 90° mirrorsystem and illumination) or a downwardly directed assembly group, whichis preferably but not necessarily of the same construction, as adeposition camera. They serve to detect the position of the componentsor of the reception points, with the aim of correcting the position ifposition errors of the components or of the reception points occur. In avariant, the sensors can be involved in the self-adjustment of thecomponent-handling device.

In a variant, at least two externally provided imaging property and/orposition sensors are directed at the dispensing point of the componentsfrom viewing directions substantially orthogonal to one another (90°plus/minus 15°) and are adapted to determine a position of a pick-upelement of the first turning device relative to the delivery device andto provide it to the controller for the self-adjustment of thecomponent-handling device.

In a variant, at least two externally provided imaging property and/orposition sensors are directed at the transfer point of the componentsfrom viewing directions substantially orthogonal to one another (90°plus/minus 15°) and are adapted to determine a position of a pick-upelement of the second turning device relative to the position of apick-up element of the first turning device and to provide it to thecontroller for the self-adjustment of the component-handling device.

In a variant, at least two externally provided imaging property and/orposition sensors are directed at the deposit point of the componentsfrom viewing directions substantially orthogonal to one another (90°plus/minus 15°) and are adapted to determine a position of the receptionpoint relative to a pick-up element of the second turning device and toprovide it to the controller for the self-adjustment of thecomponent-handling device.

In a variant of the component-handling device, a discharge point isarranged upstream or downstream of the transfer point and/or the depositpoint, which discharge point is adapted, under the control of thecontroller, to discharge a component identified by the controller asbeing a reject part by means of at least one of the position andproperty sensors and not to deposit it in the reception device as a goodpart.

In a variant of the component-handling device, a whole number of npick-up elements is associated with the first and/or the second turningdevice. n is thereby >=2. The number of pick-up elements of the firstturning device and the number of pick-up elements of the second turningdevice can be the same or different.

In a variant of the component-handling device, the first, second and/orthird axes enclose an angle relative to one another of in each case 90°plus/minus not more than 10° or 15°.

In a variant of the component-handling device, the position/propertysensors are imaging sensors having corresponding or different detectionspectra, or position sensors which measure distance by contact orwithout contact, or property sensors which detect by contact or withoutcontact.

The position and property sensors can be imaging sensors with straightor bent optical axes.

The camera systems of the position and property sensors, including theirmirror and illumination units, can be so combined by their spatialarrangement that the component inspection of the facing component faceand of two of its lateral faces can be carried out in parallel at asingle processing position. In total, two processing positions aresufficient for the complete inspection of all six side faces of, forexample, a quadrangular component. To that end, three of the six sidefaces of the component are detected at each of the two processingpositions. As the inspection position of each turning device, therespective third processing position can in a variant be fixedapproximately horizontally at the level of the axis of rotation or pivotaxis.

Additional position-measuring functions can be allocated to two furthercamera systems (front/rear camera).

In a variant of the component-handling device, the first and/or secondturning devices are at least approximately star- or wheel-shaped. Theturning devices can be precision-mounted, and their positioning alongthe respective axes or about the respective axes can take place by meansof an axially arranged drive acting linearly or rotationally, pairedwith a high-resolution (for example rotary or linear) encoder. Thepick-up elements can be distributed on the outer periphery and haveradially outward facing suction contact points for the components to beconveyed.

An advantage of arranging the turning devices offset axially byapproximately 90° to one another is that the components perform a 90°turn about the pick-up element axis, relative to the particular movementplane of the pick-up elements (or turning device axis), in theirposition during the feeding process as they are transferred from oneturning device to the next, without the pick-up element itself having tobe mounted in a rotationally movable manner. This change in orientationof the components in turn permits substantially simplified inspection ofthe four component cut faces (=component side faces). There is used forthis purpose a camera system facing the component cut face and arrangedorthogonally to the pick-up element movement plane (that is to say inthe axial direction of the turning device) at preferably a very smalldistance from the component cut faces (=lateral faces of the component)themselves.

Detection of the incorrect positioning of a pick-up element and acomponent relative to one another or to the transfer and inspectionpositions is carried out using the camera system as a pick-up element orcomponent position detecting measuring system. Where the requirements interms of accuracy are very high, three distance-measuring sensors canadditionally be provided for each turning device for bond tool positiondetection.

The optical axes of the cameras “penetrate” the inspected componentsurface. They form a reference system for the pick-up element position.On the basis thereof, deviations of the pick-up element movement pathfrom the target movement path can be determined by thedistance-measuring sensors arranged in a plane parallel to the idealpick-up sensor movement plane of the rotating turning device. Positionerrors that occur in the transfer positions can be determined therefromand compensated for by the controller.

Depending on the optical position/property sensors used and/or on thefunctional principle of the additional position sensors, the referencemeasurements for the pick-up element position and/or the self-adjustmentcan be made as the process is running or also during cyclicallyrepeating reference runs (required, for example, by means of measuringsensors operating by touch). Cyclic reference runs (in the case ofcontact sensors with brief process interruption), which can also berelatively long, are thereby required both at the beginning of theprocess, for detecting spatial position errors, and during the processfor the inclusion of heat-related displacements.

In a variant of the device, the self-adjustment can be carried outbefore the component-handling device is taken into operation. Thecontroller is thereby adapted to rotate the first and second turningdevices in succession and, by means of the optical position and propertysensors and/or the additional position sensors, to determine first arelative position of each individual pick-up element of the firstturning device to the delivery device, to determine a relative positionof each individual pick-up element of the second turning device to thepick-up element of the first turning device located opposite at thetransfer point, and to determine the relative position of the receptionpoints to the pick-up element of the second turning device situated atthe deposit point. The controller is adapted to repeat the successiverotation of the turning devices and the determination of the relativepositions at least until all possible positions of the turning devicesrelative to the delivery device, relative to one another and relative tothe reception device have been reached at least once. The controller isfurther adapted to store the determined values in a control table.

The determined position deviations of the pick-up elements of the firstturning device situated at the dispensing point relative to a previouslydefined position relative to the delivery device form the correctionvector for the first turning device in operation.

The determined position deviations of the pick-up elements of the secondturning device relative to a previously defined position relative to thepick-up element of the first turning device located opposite at thetransfer point, added to the correction vector for the first turningdevice, form the correction vector for the second turning device.

The determined position deviations of the reception point relative to apreviously defined position relative to the pick-up element of thesecond turning device located opposite at the deposit point, added tothe correction vector for the second turning device, form the correctionvector for the reception device.

In a variant, in order to compensate for position errors, in particulardetermined by the self-adjustment, of the turning devices of the pick-upelements, in particular in the component transfer positions, and thepositioning errors of the components fixed thereto (in transfer andinspection positions), a rotary correction movement of the rotary driveand orthogonally a linear correction movement in the axis direction iscarried out. To that end, the rotor drive assembly group can in avariant be arranged on a slide and moved by limited path segments bymeans of a position-controlled drive, for example an eccentric drive.

In a variant of the component-handling device, the rigid coupling of aplurality of pick-up elements to a turning device requires thecorrection values to be transferred from a component transfer positionor inspection position to the next positions in the sequence. Thesecorrections can begin at a fixed transfer position and end when the lastcomponent is transferred to the reception point. The summary positionerrors along the up to three axes and the twist about the up to threeaxes are thereby compensated for by the reception device.

In a variant of the component-handling device, the pick-up elements arenot rotatably mounted on their respective turning device. Orientationerrors of components thus cannot be compensated for during feedingitself. Therefore, in a variant, in the downstream periphery region, inparticular in the reception device, a possibility for rotationalcorrection is also to be provided in addition to the axis positioncorrection.

In another variant of the component-handling device, the rotationalcorrection takes place with rotatably mounted pick-up elements.Orientation errors of components can thus be compensated for duringfeeding itself. The orientation error is then corrected by the rotatablymounted pick-up elements of the upper and/or lower turning device,preferably by the pick-up elements of the lower turning device.

The variants presented here are less expensive compared with the priorart and offer a higher component throughput, more time for inspectionsand have fewer moving masses.

A method for the self-adjustment of the component-handling device hasthe following steps:

-   -   detecting the dispensing point, containing the delivery device        and the pick-up element situated at that point, from at least        two detection directions which are different from one another,        by at least one optical position or property sensor,    -   detecting the transfer point, containing the pick-up element of        the first turning device situated at that point and the pick-up        element of the second turning device situated at that point,        from at least two directions which are different from one        another, by at least one optical position or property sensor,    -   detecting the deposit point, containing the pick-up element        situated at that point and the reception point, from at least        two detection directions which are different from one another,        by at least one optical position or property sensor,    -   determining the position of the pick-up element situated at the        dispensing point in relation to the delivery device, and        determining a deviation from a previously defined position of        the pick-up element,    -   determining the position of the pick-up element of the second        turning device situated at the transfer point in relation to the        pick-up element of the first turning device, and determining a        deviation from a previously defined position of the pick-up        element of the second turning device,    -   determining the position of the reception point in relation to        the pick-up element situated at the deposit point, and        determining a deviation from a previously defined position of        the reception point,    -   determining, on the basis of the previously determined        deviations, a correction vector for the first turning device        and/or a correction vector for the second turning device and/or        a correction vector for each individual pick-up element and/or a        correction vector for the reception device,    -   repeating all the preceding method steps for every possible        transfer position of the first and/or second turning device,    -   checking the detection quality of the sensors and/or checking        that the pick-up elements are free of damage, by comparing the        determined relative positions of the pick-up elements to the        delivery device, to one another and to the reception points with        the relative positions of the pick-up elements to a defined        reference point. The position of the pick-up elements relative        to the reference points (one for each of the first and second        turning devices) is determined by the position and property        sensors which are situated between the dispensing point and the        transfer point (for the first turning device) or between the        transfer point and the deposit point (for the second turning        device),    -   controlling the positioning of the first turning device and/or        of the second turning device and/or of the reception device        and/or of each individual pick-up element during operation of        the component-handling device in such a manner that the        deviation between the determined and the previously defined        positions of the pick-up elements and/or the reception point is        counteracted.

More precisely, a solution is provided for a reception device, inparticular for a component-handling device of the type described above,which is adapted to rotate in a controlled manner relative to thedeposit point at least partly about a third axis containing the depositpoint by means of a rotary drive, and/or to move in a controlled mannerat least partly along one of the first, second and/or third axes bymeans of at least one linear drive, and/or to move in a controlledmanner a carrier guided by the reception device along one of the firstand/or second axes by means of a rotary drive.

The solution presented here allows the location and position of theturning devices to be compensated for simultaneously by positioningand/or rotating the reception device. The component throughput of themachine can therefore be increased as compared with the prior art. Inorder to avoid play in the tape drive of the deposit tape, the drivesmust be adjusted relative to one another in the prior art. The solutionpresented here avoids this, since transport only ever takes place in onedirection. This is useful in particular in applications in which thepockets of the carrier tape are gradually closed with an adhesive covertape. If the carrier tape were to be transported back again, problemscould arise if the cover tape had to be detached again. The play in thedrive can thereby be disregarded.

In another variant, transport can also take place in the oppositedirection.

The correction of the position of the component takes place at thereception device. More time is thus available therefor. Return transportof the tape, in which the components are deposited, is no longerrequired. The reception device can thus be of a more simpleconstruction. A second drive wheel for the return transport of the tapeas in the prior art is no longer required. Instead, where required, theentire reception device is moved contrary to the transport direction ofthe deposit tape. The advantage is that a higher positioning accuracy ofthe tape is achieved compared to prior-known variants in whichpositioning is achieved solely via the transport of the transport tape.The subsequent application of a (self-adhesive) cover tape to thetransport tape can thereby also be made easier.

In a variant, the reception device is arranged above a stationary baseplate, and the motors of the three drives are arranged beneath the baseplate. The position of the reception device can be adjusted in the X, Yand rotating about the Z axis. Each movement direction of the receptiondevice has its own drive. The position of the individual drives is notfixed. The axis of rotation for the Z-correction is close to thecomponent deposit position or falls in the center thereof.

In a variant of the reception device, the reception device is equippedwith two reception points, which are to be oriented at leastapproximately in alignment with the deposit point by controlledoperation of the rotary drive of the linear drive(s). The two receptionpoints are to be positioned relative to one another according to aspacing of adjacent component pick-up elements of the carrier.

In a variant of the reception device, an imaging property and/orposition sensor is provided for determining properties and/or theposition of a component to be received in relation to its propertiesand/or its position relative to at least one of the reception points inthe reception device. This imaging property and/or position sensor issituated in or at the center of the lower turning device. Using theimage data from this sensor, the controller is able to generatecorrection instructions in the event of property defects and/or positionerrors of the component to be received or of the reception point, inorder to effect corresponding correction movements.

In another variant, two further imaging property and/or position sensorsare provided at the reception device. One sensor is directed at thesecond window from above in order to examine quality defects. The othersensor is arranged laterally at the first window in order better to beable to detect tilting of the component as compared with the sensormentioned above.

In a variant of the reception device, the fourth rotary drive isadapted, under the control of control signals from the controller, tomove the carrier guided by the reception device in a controlled manner,by means of mechanical traction, along one of the first and/or secondaxes by approximately from 80 to 120%, preferably approximately 100%plus/minus not more than 3%, of the spacing of adjacent componentreceivers of the carrier. The rotary drive can also be adapted, underthe control of control signals from the controller and in dependence onsignals from the imaging property and/or position sensor, to rotate atleast one of the reception points with the component receiver of thecarrier situated there in a controlled manner about the third axiscontaining the deposit point by up to plus/minus 6°, preferably by up toplus/minus 3°. Furthermore, in addition or alternatively, the at leastone linear drive can be adapted, under the control of control signalsfrom the controller, to move the reception device in a controlled manneralong one of the first, second and/or third axes by approximatelyplus/minus not more than 20%, preferably by up to plus/minus 3%, of thespacing of adjacent component receivers of the carrier.

In a variant of the reception device, the fourth rotary drive is adaptedto feed the carrier guided by the reception device forwards along one ofthe first and/or second axes according to a spacing of adjacentcomponent receivers of the carrier.

In a variant of the reception device, a suction and/or blow-off deviceis provided for removing a component identified as being damaged and/orincorrectly placed from at least one of the reception points in thereception device and/or the carrier guided in the reception device.

During operation of a variant of the reception device, a sprocket wheeldriven by the fourth rotary drive engages in transport holes in thedeposit tape for transport thereof in the feed direction. The sprocketwheel preferably rotates only in a forward direction. The deposit tapehas deposit pockets for the components at regular intervals. Thesprocket wheel rotates by a fixed angle (e.g. 30°, 60°, 90°, 180°. . .360°) for each deposit pocket. The position of the deposit pocket inwhich the component was deposited is known from the image recorded bythe camera in the center of the second turning device. Moreover, it isknown from the camera at the outer periphery of the second turningdevice whether the next component to be deposited is out of position atthe pick-up element. From this position information, the distance and/orangle by which the reception device must be repositioned is calculatedin the controller. In addition, the positioning of the reception devicealso takes account of the fact that the turning device willcorrespondingly move in the x- and y-direction in order correctly totransfer the component from the upper turning device to the lowerturning device at the transfer position. The reception device is then,where necessary, moved linearly along the (X-, Y) axes and optionallyrotated in order to ensure the fine adjustment of the deposition of thecomponent.

When a component has been deposited in the deposit position, the camerain the center of the second turning device arranged thereabove has alsodetected whether the component is faulty, that is to say whether it hasbeen damaged by the deposition or already had a defect beforehand. If acomponent was identified as being defective beforehand, it is notdeposited.

The deposit position in the reception device can at the same time alsobe a first suction position. To that end, a suction device with negativepressure is arranged at the deposit position in the reception device. Inthe feed direction of the transport tape there is a second alternativesuction position. That is to say, two windows are provided at thereception device: a first window with a deposit position and a secondwindow with a suction position. The distance between the two windowscorresponds to the spacing of the carrier tape and can be adjusted tothe spacing. If the component was not deposited correctly, so that it iscrooked or still partly protruding, this is identified by a camera inthe center of the second turning device. The carrier tape cannot betransported further because of the incorrectly deposited component. Thecomponent is therefore extracted by suction at the deposit position andreplaced by the next component that is to be deposited. If the componentis damaged, it can likewise be removed at this position and replaced bythe next component to be deposited. At the position of the secondwindow, the components can be inspected for defects—optionally using afurther camera. If a component is identified as defective, the receptiondevice as a whole is moved back and the component identified as beingdefective is extracted by suction at the deposit position.

Alternatively, the second suction position can be used to remove thecomponent identified as being defective.

With the arrangement presented here it is possible to inspect acomponent in order to identify defects. The component is to be depositedby the first and second turning devices, and a component identified asbeing defective is to be removed at the deposit position. This takesplace at a common position.

The reception device moves in three directions: in the X- andY-direction and about its (Z-)vertical axis at/close to the center ofthe deposit position. This is also in contrast to conventionalarrangements, in which the carrier tape is fed in the transportdirection and the reception device is moved perpendicularly to the tapetransport direction for positioning for component deposition. Thedeposit point can also be in the form of a tray (e.g. Jedec tray) or asan antenna tape.

In an alternative variant, the reception device has an associatedsuction and/or blow-off device for removing a component which has beenidentified as damaged and/or incorrectly placed from at least one of thereception points in the reception device and/or the carrier guided inthe reception device.

In a variant, the reception device can receive components from a turningdevice whose axis of rotation is oriented substantially parallel to thefeed direction of the reception device, or in a further variant thereception device can receive components from a turning device whose axisof rotation is oriented substantially transversely to the feed directionof the reception device.

In a variant, an imaging property and/or position sensor is provided inthe center of the turning device for determining properties and/or theposition of a component to be received or for determining the positionof reception points in the reception device and/or of a componentsituated therein. This imaging property and/or position sensor isadapted to perform image acquisitions of at least one of the receptionpoints in the reception device between adjacent pick-up elementssituated at the periphery of the turning device.

In an alternative variant, there is arranged in the center of theturning device a deflection mirror or prism which is associated with theimaging property and/or position sensor arranged outside the turningdevice, for determining properties and/or the position of a component tobe received or for determining the position of reception points in thereception device and/or of a component situated therein. The deflectionmirror or prism, together with the imaging property and/or positionsensor arranged outside the turning device, is adapted to perform imageacquisitions of at least one of the reception points in the receptiondevice between adjacent pick-up elements situated at the periphery ofthe turning device.

The reception device is to be moved in a controlled manner relative to adeposit point at least partially along a first axis in both directionsby means of a linear drive. By means of a rotary drive, a carrier guidedby the reception device is to be displaced in a controlled manner alongone of the first and/or second axes in a feed direction of the carrier.The carrier guided by the reception device is equipped with tworeception points, which are to be oriented at least approximately inalignment with a deposit point for components by controlled operation ofthe drives. An imaging property and/or position sensor providesproperties and/or the position of a component in at least one of thereception points in the reception device that is to be examined inrespect of its properties and/or its position. Based on image data fromthe property and/or position sensor, correction instructions areprovided by a controller in the event of property defects and/orposition faults of the component, in order to effect correspondingcorrection movements of the reception device and/or of the carrierguided therein. The reception device has an associated suction and/orblow-off device for removing a component identified as being damagedand/or incorrectly placed from at least one of the reception points inthe reception device and/or from the carrier guided in the receptiondevice. In another variant, the imaging position and/or propertysensor(s) positioned in the center of the first/second turning devicehas/have a reflector arrangement which allows the reception device to bedetected indirectly while the turning devices are in a position providedfor the transfer of components (transfer position).

A method for removing defective components from a reception device, inparticular having the construction/mode of functioning described above,has the following steps:

-   -   detecting an incorrectly deposited component in a pocket of the        carrier for a component at the first reception point,    -   moving the reception device by means of a linear drive in the        feed direction so that the incorrectly deposited component is        situated at the second reception point, without thereby feeding        the carrier guided in the reception device, extracting by        suction the incorrectly deposited component at the second        reception point from the pocket for a component;    -   moving the reception device by means of the linear drive back        contrary to the feed direction, so that an empty pocket for a        component is situated at the first reception point, without        thereby feeding the carrier guided in the reception device,    -   depositing a component in the pocket of the carrier at the first        reception point.

Owing to increased quality requirements for electronic components, whileat the same time the dimensions thereof are falling, and because theyare to be processed in ever decreasing processing times, theconventional sensor arrangements have been identified as unsatisfactory.

There is therefore proposed as a variant an imaging sensor which issuitable and intended for detecting the position and/or properties of acomponent, in particular in a component-handling device of the typedisclosed above. This imaging sensor is equipped with at least twodetection spectra which differ from one another. It is suitable andintended in particular for detecting property defects and/or positionerrors of a component situated at the reception point of a receptiondevice. This imaging sensor is suitable and intended for cooperatingwith radiation sources which are matched to the imaging sensor asregards radiation spectrum and radiation incident angle and/or radiationreflection angle relative thereto. The imaging sensor is suitable andadapted for providing a separate image to a downstream image evaluationunit for each of its detection spectra.

In this imaging sensor, the at least two different detection spectra areconfigured, for example, in the visible and non-visible range. They canalso be configured as the red color range—630 nm plus/minus 30 nm—and/orgreen color range—530 nm plus/minus 60 nm—and/or blue color range—460 nmplus/minus 50 nm—of a color sensor.

In a variant of the imaging sensor, optically active elements areprovided which are adapted optically to couple the sensor with acomponent at at least one of the reception points in the receptiondevice and/or with the carrier guided in the reception device.

In a variant of the imaging sensor, the optically active elementsinclude deflection mirrors, prisms, color filters and/or lenses.

Some of the optically active elements and/or some of the radiationsources can be adapted to be activated, oriented and/or adjusted/focusedindependently of others.

The integrated handling/inspection device disclosed herein uses imagingsensors which on the one hand inspect all or almost all the end and/orside face(s) of a component and thereby on the other hand also providerelevant data for the positioning of the manipulators (pick-up elements)at the first and/or second turning device and the reception points.

In a variant, the imaging sensor of the first (upper) turning device isa color camera in the center of the turning device. Alternatively, thecamera can also be a black and white camera which in a further variantcooperates laterally and with a 45° deflection mirror in the center ofthe turning device. In a variant, this camera detects the componentseparated from the component supply by the component ejector duringrotation of the upper turning device through the gap between two pick-upelements. From the image thereby obtained it is possible both to inspectthe component and to determine its exact position in the componentsupply. The image acquisition takes place during rotation of the upperturning device, in the period referred to as the viewing window. Inanother variant, the camera positioned in the center of the first(upper) turning device has a mirror arrangement which allows thecomponent ejector to be detected indirectly while the turning devicesare in a position provided for the transfer of components (transferposition).

The integrated handling/inspection device disclosed here additionallyuses imaging sensors in the form of lateral cameras on the upper turningdevice. These cameras are arranged at approximately 90° radially outsidethe upper turning device, in such a manner that the front of thecomponent is detected on its circular path by a middle camera andmutually opposite lateral faces are detected by on both sides of themiddle camera. These cameras are not necessarily color cameras. Aplurality of image acquisitions can be prepared, because the upperturning device stops in the 180° position for a short time (10 ms to 60ms, for example 40 ms) because of the subsequent component transfer.This brief stoppage time is sufficient for the inspection. Black andwhite cameras can also be used for this purpose. With the lateralinspection by the two lateral cameras, the ends of the component arechecked for damage. With the rear-side inspection by the middle camera,the rear side of the component is checked for damage. A plurality ofimage acquisitions can be made for the rear-side inspection in order tohighlight different defects. The cameras used here can likewise be colorcameras. However, this is not absolutely essential because, as alreadymentioned above, sufficient time is available due to the stoppageperiod.

The integrated handling/inspection device disclosed here additionallyuses imaging sensors in the form of lateral cameras on the lower turningdevice. These cameras are arranged at approximately 90° radially outsidethe lower turning device, in such a manner that the front of thecomponent is detected on its circular path by a middle camera andmutually opposite lateral faces are detected by the cameras situated onboth sides of the middle camera. These cameras are not necessarily colorcameras. Instead, black and white cameras can also be used. At thisposition, the component is both checked for defects, and the image dataare evaluated for position data. With the lateral inspection by the twolateral cameras, the component is checked for damage on its cut faces.With the rear-side inspection by the middle camera, the rear side of thecomponent is checked for damage. A plurality of image acquisitions canbe made for the rear-side inspection, in order to highlight differentdefects. For the subsequent deposition of the component in the receptiondevice, the position data (x, y, twist) of the component can bedetermined with the lateral inspection. In another variant, therear-side inspection is used for that purpose. This information is usedby the controller to carry out any corrections. The cameras used herecan likewise be color cameras. This is not absolutely essential,however, because sufficient time is available during the stoppage time.

The integrated handling/inspection device disclosed here further usesimaging sensors in the form of a camera in the center of the lowerturning device. This camera can be a color camera with three singlechannels R, G, B. It is not important whether a 3-chip color camera or a1-chip color camera is used. 3-Chip cameras have a separate image sensorfor each color R, G, B; a 1-chip camera uses alternating activatedfilters in front of the image sensor. A black and white camera which canbe used here has one channel with, for example, 255 gray stages; in acolor camera, each of the three channels has, for example, 255 intensitylevels of a color. It is important that the three color channels of thecamera are addressable/can be read separately from one another, or thethree color channels can at least be separated in the controller.Different exposure times are possible for each channel. For example, thefollowing exposure times can be used: 5 ms (green), 12 ms (red), 15 ms(blue). According to the color channels activated in a particular case,different illuminating colors are also used in the integratedhandling/inspection device disclosed here. White light is a mixture ofall the colors, so that all the channels could be addressedsimultaneously with this illuminating color. However, this decidedlydoes not take place here, when the achievable image quality does notsatisfy the requirements.

In a variant, the imaging sensor has an associated semi-transparentmirror, which is arranged at an angle of approximately 45° to theoptical axis of the camera chip and serves to optically couple coloredlight of two, a plurality or any desired number of different detectionspectra from corresponding light sources and to direct it at aninspection region. This light directed at the inspection region, that isto say the component end face or side face and optionally thesurroundings thereof in the pocket, is reflected there and is detectedby at least one camera chip of the imaging sensor.

In a variant, the imaging sensor further has an associated light sourcein the form of an annular light source around the inspection point. Thisannular light source delivers scattered light at an angle ofapproximately from 5° to 45° in a third color range. This light directedat the inspection region is also reflected there and is detected by atleast one camera chip of the imaging sensor. The light, or the lightsources of different colors, can be arranged as desired or can also havethe same radiation angle.

The integrated handling/inspection device disclosed here uses adeflection mirror in the center of the lower turning device for couplingin a coaxial illumination of the reception device. More precisely, thecarrier in the form of a deposit tape with deposit pockets for thecomponents which is guided by the reception device is detected by thecamera. By means of a single image acquisition, an inspection for errorstakes place, for example the crooked deposition of the component so thatit is not correctly positioned in its deposit pocket, or for qualitydefects. In addition, the position data of the deposit pocket of thedeposit tape for the deposition of the next component are detected bythis single image acquisition. The information to be obtained from theindividual color channels can be divided as desired according to factorswhich are to be inspected, for example as follows: Image channel 1 withillumination type 1: position of the deposit pocket of the deposit tapefor positioning of the next component. Image channel 2 with illuminationtype 2: quality inspection of the component (cracks, laser marks,break-outs, . . . ). Image channel 3 with illumination type 3:additional inspection for special components or customer-specificdefects.

In a variant of the integrated handling/inspection device, the componentis deposited “blind”. That is to say, the actual deposition process isbased on information or position data obtained prior to the depositionprocess from the image associated with the preceding component. At thetime of the deposition process, the camera in the center of the secondturning device does not see the deposit point because the view isblocked by the pick-up element depositing at that time.

In a variant, information or position data on whether a component istwisted is provided by a camera on the outer periphery of the lowerturning device. The information or position data is forwarded to thecontroller of the reception device. The position of the reception deviceis known from the image of the component previously deposited in thedeposit pocket of the deposit tape. The distance between the two pocketsis likewise known. The angle and x- and y-value by which the receptiondevice must be moved for the next component to be deposited can becalculated therefrom.

Corresponding additional or alternative method steps follow from thefurther device aspects.

The arrangement of the imaging sensor system presented here is capableof managing with fewer image acquisitions than conventional sensorarrangements. The image data obtained can be evaluated both for thedischarge of reject parts and for the positioning of the actuators ofthe handling/inspection device. This integrated architecture and theprocedure possible therewith reduces the processing time and offersincreased inspection quality with an increased throughput.

BRIEF DESCRIPTION OF THE DRAWINGS

Further features, properties, advantages and possible modifications willbe clear to a person skilled in the art from the following description,in which reference is made to the accompanying drawings. The figuresshow, in schematic form, an optical inspection device for a component,

FIG. 1 is a side view, in schematic form, of a component-handling devicehaving a self-adjusting device, wherein the component-handling devicecomprises a first turning device for removing prismatic or cylindricalcomponents from a structured component supply and for depositing them ata reception device.

FIG. 2 shows, in schematic form, the orientation of the various positionand property sensors of the component-handling device of FIG. 1 inrelation to the side faces of a component.

FIG. 3 is a top view, in schematic form, of one of the position andproperty sensors arranged at the periphery of one or both turningdevices of the component-handling device.

FIG. 4 is a perspective view, in schematic form, of a reception devicefor use with the component-handling device.

FIG. 5 shows, in schematic form, one of the position and propertysensors with an associated illumination arrangement for use with thecomponent-handling device.

DETAILED DESCRIPTION OF THE EMBODIMENTS

FIG. 1 shows a component-handling device 100 for removing prismaticcomponents B in the form of electronic semiconductor chips from astructured component supply and for depositing them at a receptiondevice 200. The component-handling device 100 presented here takes thecomponents B from a component supply, here a wafer, arrangedhorizontally in the upper region of the component-handling device, bymeans of a stationary ejection unit 110.

The ejection unit 110 works in the variant shown with a needlecontrolled by a controller ECU, or it works, for example, in acontactless manner with a laser beam, in order to free the componentssingly from the component supply so that they are conveyed to a firstturning device 130. This first turning device 130 has the shape of astar or wheel and has on its periphery a plurality of pick-up elements132 (in the example shown eight) for the singularized components B. Eachof the pick-up elements 132 is adapted, when it is situated at the 0°position of the first turning device 130 nearest the ejection unit 110,to receive a component from the structured component supply at adispensing point SPS.

The pick-up elements 132 are arranged facing radially outwards on the(imaginary) periphery of the star- or wheel-shaped first turning device130 and carry the components B. The pick-up elements 132 of the firstturning device 130 are radially movable relative to the axis of rotation(here the X-axis). The pick-up elements 132 are thus able to feed thecomponents B, each fixed to one of the pick-up elements 132, within apivot angle—here between 0° and 180°—between component takeover andtransfer.

The first turning device 130 rotates the component B, controlled by thecontroller ECU not shown in greater detail, through a firstpredetermined angle, here 180°, about a first axis, here the X-axis, toa first transfer point ÜS . The component B is thereby turned about itslongitudinal or transverse axis. A second turning device 150 similar tothe first turning device 130 and having a plurality of second pick-upelements 152, here likewise eight pick-up elements, is adapted toreceive the component B at the transfer point ÜS S from a pick-upelement 132 of the first turning device 130 when the component issituated at the 0° position of the second turning device 130 nearest thetransfer point ÜS .

The second turning device 150 turns the received component B, controlledby the controller ECU, through a second predetermined angle, herethrough approximately 180°, about a second axis, here the Y-axis, aboutits longitudinal or transverse axis and feeds it to a deposit point ABS.

In another variant, the first turning device 130 likewise rotates thecomponent B, controlled by the controller ECU not shown in greaterdetail, through a first predetermined angle, here 180°, about the firstaxis (here the X-axis). The component B is thereby likewise turned aboutits longitudinal or transverse axis, but is fed directly to the depositpoint ABS without previously being transferred to a second turningdevice 150.

The first, second and/or third axes each enclose an angle of 90°plus/minus not more than 10° or 15° with one another and are orientedaccording to a three-dimensional orthogonal coordinate system.

The two star- or wheel-shaped turning devices 130, 150 are arrangedorthogonally to one another and otherwise correspond in terms of theirconstruction. In a departure from the representation in FIG. 1, thearrangement of the two turning devices 130, 150 relative to the feeddirection of the reception device 200 can also be rotated through 90°about the Z-axis. In this case, the lower turning device 150 is orientedat least approximately transversely to the feed direction of thereception device 200.

The first and second turning devices 130, 150 have associated positionand property sensors K1 . . . K4, K7 . . . K11. As shown in FIG. 1,these sensors are situated at a plurality of points of the arrangementas a whole. They are adapted to detect position data of the first andsecond turning devices 130, 150, position data of components B situatedon the pick-up elements 132, 152, and also properties of components Bsituated on the pick-up elements 132, 152. The data thereby obtained areprovided to a controller. In the embodiment illustrated here, a firstcamera arrangement K1 in the center of the first turning device 130 isdirected perpendicularly upwards at the component supply. Cameraarrangement K1 hereby comprises a camera and two mirrors arranged atright angles to one another, which mirrors are each mounted at a 45°angle relative to the plane spanned by the X- and Y-axis. These mirrorsallow the dispensing point SPS and the ejection unit 110 and the pick-upelements 132 situated at the dispensing point SPS to be detectedindirectly from a first and a second detection direction. The mirrorsare so arranged that the two detection directions run orthogonally toone another.

A second camera arrangement K2 having three cameras—not visible in FIG.1—at the periphery of the first turning device 130 is directed at 90° atthe component B guided past thereon. Details of this second cameraarrangement K2 will be discussed in connection with FIG. 3. A thirdcamera arrangement K3 having three cameras, corresponding to the secondcamera arrangement K2, at the periphery of the second turning device 150is directed at 90° at the component B guided past thereon. The cameraarrangements K2 and K3 are each also suitable for determining a positiondeviation of the pick-up element 132, 152 guided past from a previouslydefined reference point.

A fourth camera arrangement K4 in the center of the second turningdevice 150 is directed at the deposit point ABS or the first receptionpoint ES1 in the reception device 200. Camera arrangement K4 comprises acamera and two mirrors arranged at right angles to one another, whichmirrors are each mounted at a 45° angle relative to the plane spanned bythe X- and Y-axis. These mirrors allow the deposit point ABS and thereception point ES1 and the pick-up element 152 situated at the depositpoint ABS to be detected indirectly from a first and a second detectiondirection. The mirrors are so arranged that the two detection directionsrun orthogonally to one another.

A seventh camera arrangement K7 in the center of the first turningdevice 130 is directed at the transfer point ÜS and the pick-up elements132 and 152 of the first and second turning devices. Camera arrangementK7 comprises a camera and two mirrors arranged at right angles to oneanother, which mirrors are each mounted at a 45° angle relative to theplane spanned by the X- and Y-axis. These mirrors allow the transferpoint ÜS and the pick-up elements 132, 152 situated at the transferpoint to be detected indirectly from a first and a second detectiondirection. The mirrors are so arranged that the two detection directionsrun orthogonally to one another.

In the variant in which the components are transferred from the firstturning device 130 to the reception device 200, the camera arrangementK7 functionally replaces the camera arrangement K4 of the sameconstruction.

In the variant in which the components B are transferred from the firstturning device 130 directly to the reception point ES1, the cameraarrangement K7 in the center of the first turning device 130 is directedat the deposit point ABS and the first reception point ES1 in thereception device 200. The mirrors of the camera arrangement are soarranged that detection of the reception point ES1 in the receptiondevice 200 is possible from two mutually orthogonal detectiondirections.

An eleventh camera arrangement K11 in the center of the second turningdevice 150 is directed at the transfer point ÜS and the pick-up elements132 and 152 of the first and second turning devices. Camera arrangementKu comprises a camera and two mirrors arranged at right angles to oneanother, which mirrors are each mounted at a 45° angle relative to theplane spanned by the X- and Y-axis. These mirrors allow the transferpoint and the pick-up elements 132, 152 situated at the transfer pointÜS to be detected indirectly from a first and a second detectiondirection. The mirrors are so arranged that the two detection directionsrun orthogonally to one another.

The controller ECU is adapted to rotate the first turning device 130 ina controlled manner about a first axis (here the X-axis) by means of afirst rotary drive DA1 and to move the first turning device 130 in acontrolled manner along the first axis by means of a first linear driveLA1.

The controller ECU is further adapted to rotate the second turningdevice 150 in a controlled manner about a second axis (here the Y-axis)that is not collinear with the first axis (here the X-axis) by means ofa second rotary drive DA2 and to move the second turning device 150 in acontrolled manner along the second axis by means of a second lineardrive LA2.

The imaging sensors inspect the end and/or side face(s) of the componentB and also provide relevant data for the positioning of the first andsecond turning devices 130, 150 along and about their axes, and also thepick-up elements 132, 152 and the components B situated thereon and thereception points. The data for the positioning of the first and secondturning device 130, 150 and the pick-up elements 132, 152 can inparticular also be used during the self-adjustment of the device.

A camera arrangement K8 having two cameras—only one is visible in FIG.1—at the periphery of the first, second turning device 130, 150 isdirected at the dispensing point SPS from two different detectiondirections. The cameras are each arranged offset relative to one anotherby 90°, plus/minus not more than 10° or 15°, in a plane spanned by theX- and Y-axis and are so directed at the dispensing point SPS that theydetect both the ejection unit 110 and the pick-up element 132 at leastin parts. The camera arrangement K8, on account of the substantiallyright-angled arrangement (necessary for this purpose) of the twoindividual cameras, is able to determine a position of the pick-upelement 132 relative to the ejection unit 110 along the X-, Y- andZ-axis.

A camera arrangement K9 having two cameras—only one is visible in FIG.1—at the periphery of the first/second turning device 130, 150 isdirected at the deposit point ABS from two different detectiondirections. The cameras are each arranged offset relative to one anotherby 90°, plus/minus not more than 10° or 15°, in a plane spanned by theX- and Y-axis and are so directed at the deposit point ABS that theydetect both the pick-up elements 132, 152 and the reception point ES1 atleast in parts. The camera arrangement K9, on account of thesubstantially right-angled arrangement (necessary for this purpose) ofthe two individual cameras, is able to determine a position deviation ofthe reception point ES1 relative to the pick-up element 132, 152 alongthe X-, Y- and Z-axis.

A camera arrangement K10 having two cameras—only one is visible in FIG.1—at the periphery of the first/second turning device 130, 150 isdirected at the transfer point ÜS from two different detectiondirections. The cameras are each arranged offset relative to one anotherby 90°, plus/minus not more than 10° or 15°, in a plane spanned by theX- and Y-axis and are so directed at the transfer point ÜS that theydetect both the pick-up element 132 and pick-up element 152 at least inparts. The camera arrangement K10, on account of the substantiallyright-angled arrangement (necessary for this purpose) of the twoindividual cameras, is able to determine a position deviation of thepick-up element 152 relative to the pick-up element 132 along the X-, Y-and Z-axis.

The component-handling device 100 is equipped with a reception device200, associated with the deposit point ABS, for a component B fedthereto. The reception device 200 has associated position and propertysensors K4/K7, K5 which are adapted to detect position data of thecomponent B fed to the deposit point ABS, position data and propertiesof reception points ES1, ES2 in the reception device 200 and of thecomponents B situated therein, and to provide them to a controller ECU.The position and property sensor K5 is a fifth camera arrangement, whichis directed at a second window at the second reception point KS2. Thecontroller ECU is adapted to rotate the reception device 200 in acontrolled manner about a third axis (here the Z-axis) containing thedeposit point ABS by means of a third rotary drive DA3 and to move thereception device in a controlled manner along the first and second axesby means of a third and a fourth linear drive LA3, LA4. By means of afourth rotary drive DA4, the controller ECU moves a carrier 320 guidedby the reception device 200 along the first axis (here the X-axis) in acontrolled manner. This carrier 320 serves to pick up the components Bin singularized form from the turning device 130, 150. The turningdevices 130, 150 and the rotary drives DA1, DA2, . . . each have ahigh-resolution rotary angle encoder, not shown in greater detail,connected to the controller ECU for determining their respectiverotation position.

In the reception device 200, the fourth rotary drive DA4 serves, underthe control of control signals from the controller ECU, to displace thecarrier 320 guided by the reception device 200 in a controlled manneralong the first axis (here the X-axis) by approximately 100% plus/minusnot more than 3% of the spacing of adjacent component receivers(pockets) of the carrier 320. The spacing is given by thecenter-to-center distance of two successive pockets. The third rotarydrive DA3 is adapted, under the control of control signals from thecontroller ECU and in dependence on signals from the imaging propertyand position sensor in the center of the second turning device 150, orin a variant of the imaging property and position sensor in the centerof the first turning device 130, to rotate one of the reception pointsES1 with the component receiver of the carrier 320 situated there in acontrolled manner about the Z-axis containing the deposit point by up toplus/minus 6°.

In the variant shown in FIG. 4, the fourth rotary drive DA4 of thereception device 200 has a sprocket wheel which engages in transportholes 325 of the carrier 320 (deposition tape) in order to transport itin the feed direction. The sprocket wheel preferably rotates only in aforward direction.

In this variant, a suction and/or blow-off device 340 is provided on thedownstream side relative to the reception point ES1. This is optional,however. Components B identified as being damaged or incorrectly placedare thereby removed from their pocket, under the control of controlsignals from the controller ECU.

For sucking the component B into the pick-up elements 132, 152, forholding the component B in the pick-up elements 132, 152, for depositingthe component B with or without a controlled blow-off pulse, and forfreely blowing the component B from the pick-up elements 132, 152, theseare connected to a pneumatic unit not shown in greater detail. Thepneumatic unit, controlled by the controller ECU, subjects theindividual pick-up elements 132, 152 to excess or negative pressure,under valve control, at the required point in time or for the requiredperiod, in order to pick up the components B individually, hold them anddeposit them again.

If the inspection results obtained at the individual stations by meansof the controller ECU and the position and property sensors arepositive, the component B in question is deposited in the receptionpoint ES1, that is to say the pocket of the carrier 320, currentlysituated at the deposit point ABS. If the inspection results obtainedare negative, the component B is rotated further by a further positionto a first suction device 330, where it is extracted by suction from itspick-up element 132, 152 on the first or second turning device 130, 150.If it becomes apparent from a position and property sensor monitoringthis reception point ES1 (see also FIG. 5) that the deposited componentB, after deposition, has a position error or property defect, it isremoved by suction from the pocket of the carrier 320 by means of asecond suction device 340 situated on the downstream side relative tothe reception point ES1. In this case, controlled by the controller ECU,the entire reception device 200 together with the carrier 320 is thenmoved back against the feed direction of the carrier 320 by means of thethird linear drive unit LA3 by the center-to-center distance of twopockets of the carrier 320. The next component B on the turning device130, 150 is then introduced into the pocket of the carrier 320 which hasbeen freed.

In a further variant, an additional suction device, not shown in greaterdetail, is associated with the first reception point ES1 for removing bysuction a crooked component at the reception point ES1. Any qualitydefects can be detected by the position and property sensor K4/K7 or bythe position and property sensor K5 at the second window. If theposition and property sensor K5 detects a quality defect, the receptiondevice 200, together with the carrier 320, is transported back, and thecomponent B is then removed by suction from the pocket of the carrier320 at the deposit point. Tilting of a crooked component at thereception point ES1 can be detected by a position and property sensorK6, not shown in greater detail, which is associated with the receptionpoint ES1. This position and property sensor K6 is arranged laterally tothe carrier 320 and detects the reception point ES1 directly or via adeflection mirror over the upper edge of the carrier 320. Any tilting ora protrusion of an incorrectly deposited component can thus beidentified.

As is illustrated in FIG. 2 in conjunction with FIG. 1, the cameraarrangement K1 in a variant is directed at the component supply as aposition and property sensor in the center of the first turning device130. The end face D2 of the component B is thereby inspected forposition and defects. The camera arrangement K1 in this variant isadapted to perform an image acquisition between two adjacent pick-upelements 132 during the turning movement of the first turning device130. From these image data, the controller generates correspondingcorrection movements of the ejection unit, of the component supply orwafer and of the first turning device 130.

The second camera arrangement K2 is directed, as a position and propertysensor, with its three cameras at the periphery of the first turningdevice 130, at approximately 90° at the three sides S2, S4 and D1 of thecomponent B. A top view of the camera arrangement K2 with its threecameras K2-1, K2-2 and K2-3 is shown in FIG. 3. The middle camera K2-2inspects the end face D1 of the component B, and the two outer camerasK2-1 and K2-3, via respective mirrors SP1 and SP2, inspect the sidefaces S2 and S4 of the component B. From the image acquisitions therebydetected, it is possible to determine, in addition to any defects of thecomponent B on those faces, also the exact position and rotation of thecomponent B on its pick-up element 132. This information is used in thecontroller ECU to change the orientation of the first turning device 130and of the second turning device 150 along their axes and rotationorientation when the inspected component B is transferred at thetransfer point ÜS from the first turning device 130 to the secondturning device 150. In addition, the second camera arrangement K2 isalso suitable for determining the deviation of each pick-up element 132of the first turning device 130 from a previously defined commonreference point.

The third camera arrangement K3 is directed, as a position and propertysensor, with its three cameras externally at the periphery of the secondturning device 150, at approximately 90° at the three sides S1, S3 andD2 of the component B. This camera arrangement K3 corresponds inconstruction and arrangement to the camera arrangement K2 with its threecameras and both mirrors in FIG. 3. From the image acquisitions therebydetected, it is possible to determine, in addition to any defects of thecomponent B on those faces, also the exact position and rotation of thecomponent B on its pick-up element 152 of the second turning device 150.This information is used in the controller ECU to change the orientationof the second turning device 150 and of the reception device 200 alongtheir axes and rotation orientations when the inspected component B istransferred at the transfer point ÜS from the second turning device 150into the reception point ES1 situated at the deposit point ABS, that isto say the pocket of the carrier 320. In addition, the third cameraarrangement K3 is also suitable for determining the deviation of eachpick-up element 152 of the second turning device 150 from a previouslydefined common reference point.

The fourth camera arrangement K4 is directed, as a position and propertysensor in the center of the second turning device 150, at the receptionpoint E1 in the reception device 200. The controller ECU then effectscorresponding correction movements of the second turning device 150 andof the reception device 200. The camera arrangement K4 is furtheradapted to detect both the reception point ES1 and the pick-up element152 situated at the deposit point ABS from different detectiondirections at the same time by means of mirror optics, so that arelative position of the reception point ES1 to the pick-up element 152can be determined by the controller ECU for the self-adjustment of thecomponent-handling device 100.

The component-handling device 100 shown in FIG. 1 comprises a controllerwhich controls the autonomous adjustment of the component-handlingdevice 100.

Self-adjustment is possible in particular before the component-handlingdevice 100 is taken into operation but also during operation of thecomponent-handling device 100.

Any desired combinations of the camera arrangements K1, K4, K7, K8, K9,K10 and K11 for the self-adjustment of the component-handling device 100are possible if at least one sensor directed at the dispensing pointSPS, at least one sensor directed at the transfer point ÜS and at leastone sensor directed at the deposit point ABS are involved in theself-adjustment process.

In the variant in which the components are transferred from the firstturning device 130 to the reception device 200, two camera arrangementsare sufficient for the self-adjustment of the component-handling device100 if at least one sensor directed at the dispensing point SPS and atleast one sensor directed at the deposit point ABS are involved in theself-adjustment process.

The controller is adapted gradually to rotate the first turning device130 during the self-adjustment process and to determine a position ofeach individual pick-up element 132 of the first turning device 130relative to the ejection unit 110 by means of the camera sensors K1and/or K8. By means of the camera sensors K7 and/or K10 and/or K11, theposition of the pick-up element 152 of the second turning device 150situated at the transfer point ÜS in relation to the pick-up element 132of the first turning device 130 situated at the transfer point isdetermined. By means of the camera sensors K9 and/or K4/K7 (K4 in thevariant with two turning devices 130, 150 and K7 in the variant with oneturning device 130), the position of the reception point ES1 situated inthe reception device 200 relative to the pick-up element 132, 152 of thefirst/second turning device 130, 150 situated at the deposit point ABSis determined.

In the variant with only a first turning device 130, only the relativepositions at the dispensing point SPS and the deposit point ABS aredetermined.

The controller is adapted to repeat the gradual rotation of the turningdevices 130, 150 and the determination of the relative position at leastuntil all possible transfer positions of the turning device 130, 150 atthe dispensing point SPS, the transfer point ÜS and the deposit pointABS have been reached at least once. The controller is further adaptedto store the determined values in a control table.

The determined 3-dimensional position deviations of the pick-up elements132 of the first turning device 130 relative to a previously definedposition in relation to the ejection device 110 form in operation the3-dimensional correction vector for the first turning device 130 for theparticular transfer position.

The determined 3-dimensional position deviations of the pick-up element152 of the second turning device 150 situated at the transfer point ÜSrelative to a previously defined position in relation to the pick-upelement 132 of the first turning device 130 form in operation, whenadded to the 3-dimensional correction vector for the first turningdevice 130 for the particular transfer position, the 3-dimensionalcorrection vector for the second turning device 150 for the particulartransfer position.

The determined 3-dimensional position deviations of the reception pointsES1 relative to a defined position in relation to the pick-up element152 of the second turning device 150 situated at the deposit point ABSform in operation, when added to the 3-dimensional correction vector forthe second turning device 150 for the particular transfer position, the3-dimensional correction vector for the reception device 200 for theparticular transfer position.

In the variant in which the component-handling device 100 has only afirst turning device 130, the 3-dimensional correction vector for thereception device 200 is developed analogously with the positions of thereception points ES1 relative to a defined position in relation to thepick-up element 132 of the first turning device 130 and by addition tothe 3-dimensional correction vector for the first turning device 130.

The correction vector precision is increased when a plurality ofcomplete rotations of the turning devices 130, 150 are carried out andmean values for the correction vectors are determined in each case.

In other variants of the component-handling device 100, the correctionvector can be 2-dimensional or 1-dimensional, wherein the correctiondimensions for the first turning device 130, the second turning device150 and the reception device 200 can be the same or different.

A first check of the detection quality of the camera sensors used forthe self-adjustment is effected by carrying out the self-adjustmentprocess with K1, K4 and K7 or K11 and/or K8 independently of one anotherand then with K2; the self-adjustment process can further be carried outwith K7 and/or K10. If the results do not correspond, there is ameasuring error. A check of the detection quality of the adjustmentsensor arrangement and/or a check of the pick-up element 132 for damageis thus carried out on the basis of the comparisons.

In other variants, any desired combinations of the camera sensors K1,K4, K7, K8, K9, K10 and K11 are possible for the mutually independentself-adjustments, provided that none of the sensors is used in bothself-adjustments, and in both self-adjustments at least one sensor isdirected at the dispensing point SPS, the transfer point ÜS and thedeposit point ABS.

A second check of the detection quality of the camera sensors used forthe self-adjustment and an additional check that the pick-up elements132, 152 are free of damage is effected by comparing the relativepositions of the pick-up elements 132, 152 to the defined referencepoints determined by the camera arrangements K2 and K3 with the relativepositions of the pick-up elements 132, 152 to one another, to theejection unit 110 and to the reception point ES1 for each pick-upelement 132, 152, in each case by the controller. If the determineddeviations do not correspond—at least—in their respective relations toone another, there is a measuring error and/or one of the pick-upelements 132, 152 is damaged.

In the variant in which the component-handling device 100 has only afirst turning device 130, the first check of the detection quality ofthe self-adjustment is effected by carrying out the self-adjustment withthe camera sensors K1 and K7 and also K8 and K9, independently of oneanother. If the results do not correspond, there is a measuring error.Any desired combinations of the camera sensors K1, K7, K8, K9 for themutually independent self-adjustments are possible, provided that noneof the sensors is used in both self-adjustments and at least one sensoris directed at each of the dispensing point SPS and the deposit pointABS in both self-adjustments.

In the variant in which the component-handling device 100 has only afirst turning device 130, the second check of the detection quality andthe additional check that the pick-up elements 132 of theself-adjustment are free of damage are carried out by comparing therelative positions of the pick-up elements 132 to the defined referencepoints with the relative positions of the pick-up elements 132 to theejection unit 110 and to the reception point ES1 for each pick-upelement 132 by means of the controller. If the determined deviations donot correspond—at least—in their respective relations to one another,there is a measuring error and/or one of the pick-up elements 132 isdamaged.

The position and property sensor 400 shown in FIG. 5 is, as an imagingsensor, a variant of the camera arrangements K1-K5. This sensor 400 hasa camera chip 410 which records the visible light spectrum. In thisimaging sensor 400, the three different detection spectra are the redcolor range—630 nm plus/minus 30 nm—, the green color range—530 nmplus/minus 60 nm—and the blue color range—460 nm plus/minus 50 nm—of acolor sensor.

The imaging sensor 400 has an associated semi-transparent mirror 420which is arranged at an angle of approximately 45° to the optical axisof the camera chip 410. The semi-transparent mirror 420 serves tooptically couple colored light of two detection spectra, here the greencolor range and the blue color range, from corresponding light sources440 and to direct it at an end face of the component B. This light inthe green and blue color range directed at the component B is detectedby the camera chip 410. Depending on the spatial conditions, otherdeflection mirrors, prisms, color filters or lenses can also beprovided.

A further light source 450 is arranged in one embodiment as an annularlight source around the reception point ES1 situated at the depositpoint ABS and provides scattered light at an angle of approximately from5° to 45° in the red color range to the end face of the component B.This light in the red color range directed at the component B is alsodetected by the camera chip 410.

Some of the optically active elements and/or radiation sources can beadapted to be oriented and/or adjusted and/or focused independently ofothers.

The camera chip 410 in the present variant is a color camera with threeindividual channels R, G, B. However, it can also be a camera with aplurality of channels. The three color channels of the camera areaddressable/to be read out separately from one another. With a singleimage acquisition, the component B is inspected for errors, for examplethe crooked deposition of the component B so that it is not correctlypositioned in the intended pocket of the carrier 320, or for qualitydeficiencies. In addition, the exact position data of the pocket of thecarrier 320 are also detected by this single image acquisition for thedeposition of the next component B. The information to be obtained fromthe individual color channels is divided as follows: Image channel 1with illumination type 1: position of the deposit pocket of the deposittape for positioning of the next component. Image channel 2 withillumination type 2: quality inspection of the component (cracks, lasermarks, break-outs, . . . ). Image channel 3 with illumination type 3:additional inspection for special components or customer-specificdefects.

Owing to the imaging sensor system presented herein, fewer imageacquisitions are required as compared with conventional sensorarrangements in order to achieve the discharge of reject parts andpositioning of the actuators.

It should be noted that, although numerical ranges and numerical valueshave been disclosed herein, all numerical values between the disclosedvalues and any numerical sub-range within the mentioned ranges arelikewise to be regarded as disclosed.

The above-described variants of the device and their functional andoperational aspects serve merely for better understanding of theirstructure, functioning and properties; they do not limit the disclosure,for example, to the exemplary embodiments. The figures are partlyschematic, important properties and effects in some cases being shown ona significantly enlarged scale in order to clarify the functions, activeprinciples, technical configurations and features. Any mode offunctioning, any principle, any technical configuration and any featurethat is/are disclosed in the figures or in the text can be combinedfreely and arbitrarily with all the claims, any feature in the text andin the other figures, other modes of functioning, principles, technicalconfigurations and features which are contained in this disclosure orfollow therefrom, so that all conceivable combinations are to beassigned to the described procedure. Combinations between all theindividual implementations in the text, that is to say in every sectionof the description, in the claims, and also combinations betweendifferent variants in the text, in the claims and in the figures, arealso included. The claims also do not limit the disclosure and thus thepossible combinations of all the indicated features with one another.All the disclosed features are explicitly also disclosed hereinindividually and in combination with all the other features.

REFERENCE SIGNS

-   deposit point ABS-   component B-   side faces S1, S2, S3, S4 of the component-   end faces D1, D2 of the component-   first rotary drive DA1 for rotating the first turning device about    the first axis (X-axis) second rotary drive DA2 for rotating the    second turning device about the second axis (Y-axis)-   third rotary drive DA3 for rotating the reception device about a    third axis (Z-axis) containing the deposit point (ABS)-   fourth rotary drive DA4 of the reception device transports the    carrier in the feed direction-   first linear drive LA1 for moving the first turning device along the    first axis (X-axis)-   second linear drive LA2 for moving the second turning device along    the second axis (Y-axis)-   third linear drive LA3 for moving the reception device along the    first axis-   fourth linear drive LA4 for moving the reception device along the    second axis-   fifth linear drive LA5 for moving a carrier, guided by the reception    device, along the first axis (X-axis)-   first reception point ES1-   second reception point ES2-   controller ECU-   position and property sensors K1 . . . K11-   first camera arrangement K1 in the center of the first turning    device directed perpendicularly upwards-   second camera arrangement K2 having three cameras, at the periphery    of the first-   turning device, is directed at 90° at the component guided past    thereon-   third camera arrangement K3 having three cameras, at the periphery    of the second turning device, is directed at 90° at the component    guided past thereon-   fourth camera arrangement K4, at the center of the second turning    device, is directed at the deposit point or the first reception    point in the reception device fifth camera arrangement K5 is    directed at the second window at the second reception site-   seventh camera arrangement K7, in the center of the first turning    device, is directed at the transfer point ÜS-   eighth camera arrangement K8 having two cameras, at the periphery of    the turning devices, is directed at the dispensing point from two    mutually orthogonal detection directions-   ninth camera arrangement K9 having two cameras, at the periphery of    the turning devices, is directed at the transfer point from two    mutually orthogonal detection directions-   tenth camera arrangement K10 having two cameras, at the periphery of    the turning devices, is directed at the deposit point from two    mutually orthogonal detection directions,-   eleventh camera arrangement K11, in the center of the second turning    device, is directed at the transfer point ÜS-   mirrors SP1, SP2-   dispensing point SPS-   transfer point ÜS-   component-handling device 100-   ejection unit 110-   first turning device 130-   first pick-up element 132-   second turning device 150-   second pick-up element 152-   reception device 200-   carrier 320-   transport holes 325-   first suction device 330-   discharge point 335-   suction and/or blow-off device 340-   sensor 400-   camera chip 410-   semi-transparent mirror 420-   light sources 440-   further light source 450

1. A self-adjustment device for the self-adjustment of acomponent-handling device for electronic components, which is designedand arranged to transfer the components from an ejection unit at adispensing point to a first adjustable turning device having a pluralityof first pick-up elements, and to turn the transferred componentsthrough a first predetermined angle about its longitudinal or transverseaxis to feed it to a deposit point, and to deposit it there on anadjustable reception device at a predetermined reception point,comprising: a first adjustment sensor arrangement directed at thedispensing point, which is designed and arranged to detect a position ofthe first pick-up elements positioned at the dispensing point inrelation to the ejection unit, and a second adjustment sensorarrangement directed at the deposit point, which is designed andarranged to detect a position of the reception point in relation to theposition of the first pick-up elements positioned at the deposit point,wherein the first and the second adjustment sensor arrangements are eachdesigned and arranged to detect the dispensing point/the deposit pointfrom at least two detection directions which are different from oneanother, and the first and second adjustment sensor arrangements areeach designed and arranged to provide image acquisitions for eachtransfer position of the first turning device to a downstreamcontroller, wherein for each transfer position of the first turningdevice, the controller determines, on the basis of the imageacquisitions obtained, a correction vector which is used duringoperation of the component-handling device to adjust the first turningdevice and/or the individual first pick-up elements and/or the receptiondevice.
 2. The self-adjustment device as claimed in claim 1, furthercomprising: a position and property sensor which is directed from theperiphery of the first turning device at 90° at the first pick-upelements guided past thereon and which is in particular a camera sensorwhich is designed and arranged to determine a position of the firstpick-up elements relative to a previously defined reference point. 3.The self-adjustment device as claimed in claim 1, wherein the firstadjustment sensor arrangement and/or the second adjustment sensorarrangement each consist of a first imaging sensor, in particular afirst camera, and a second imaging sensor, in particular a secondcamera.
 4. The self-adjustment device as claimed in claim 1, wherein thefirst adjustment sensor arrangement and/or the second adjustment sensorarrangement each consist of an imaging sensor, in particular a camera,directed from the center of the first turning device perpendicularly atthe dispensing point or the deposit point, and at least two reflectors,in particular mirrors, arranged at right angles to one another, whereinthe imaging sensor is suitable and intended for detecting the dispensingpoint or the deposit point indirectly from a first and second detectiondirection, wherein the reflectors are so arranged that the two detectiondirections are orthogonal to one another.
 5. The self-adjustment deviceas claimed in claim 1, wherein the controller is suitable and intended,on the basis of the image acquisitions obtained by the adjustment sensorarrangements, for determining and storing the position of the firstpick-up elements situated at the dispensing point in relation to theejection unit, and determining and storing the position of the receptionpoint in relation to the first pick-up elements situated at the depositpoint, and/or determining and storing a position deviation of theparticular pick-up element from a previously defined position, and onthe basis of the determined positions, determining a correction vectorfor the position of the individual first pick-up elements and/or for thefirst turning device to which the first pick-up elements are fixed,and/or on the basis of the determined positions, determining acorrection vector for the reception device, and determining furthercorrection vectors for each transfer position of the first turningdevice in the same manner, and controlling the positioning of the firstturning device and/or of the individual first pick-up elements duringoperation in order to counteract the deviation between the determinedposition of the first pick-up elements relative to the position of theejection unit, and controlling the positioning of the reception deviceand/or of the individual first pick-up elements during operation inorder to counteract the deviation between the determined position of thereception point relative to the position of the first pick-up elements,and/or comparing the position of the first pick-up elements relative tothe position of the ejection unit and/or to the position of thereception point with the position of the first pick-up elements relativeto the defined reference point.
 6. The self-adjustment device as claimedin claim 2, wherein the first and/or second adjustment sensorarrangement is permanently connected to the component-handling device,and/or the position and property sensor is permanently connected to thecomponent-handling device.
 7. The self-adjustment device as claimed inclaim 1, further comprising: a second adjustable turning device having aplurality of second pick-up elements, which is designed and arranged toreceive the component at a transfer point from a the first pick-upelements of the first turning device, to turn the received componentthrough a second predetermined angle about its longitudinal ortransverse axis, to feed it to the deposit point and to deposit it thereon an the adjustable reception device at the predetermined receptionpoint, further comprising a third adjustment sensor arrangement,directed at the transfer point between the first turning device and thesecond turning device, which is designed and arranged to detect aposition of the second pick-up elements of the second turning devicepositioned at the transfer point in relation to the first pick-upelements of the first turning device positioned at the transfer point.8. A method for the self-adjustment of a component-handling device whichtransfers electronic components from an ejection unit a at a dispensingpoint to a first turning device having a plurality of first pick-upelements, and turns the transferred components through a firstpredetermined angle about their longitudinal or transverse axis, feedsthem to a deposit point and deposits them there on an adjustablereception device at a predetermined reception point and comprises thefollowing process steps: detecting the dispensing point, containing theejection unit and the first pick-up elements situated at that point,from at least two detection directions which are different from oneanother, by means of an adjustment sensor arrangement, detecting thedeposit point, containing the first pick-up element situated at thatpoint and the reception point, from at least two detection directionswhich are different from one another, by means of an adjustment sensorarrangement, determining the position of the first pick-up elementssituated at the dispensing point in relation to the ejection unit, anddetermining a deviation from a previously defined position of the firstpick-up elements, determining the position of the reception point inrelation to the first pick-up elements situated at the deposit point,and determining a deviation from a previously defined position of thereception point, determining, on the basis of the previously determineddeviations, a correction vector for the first turning device and/or foreach individual first pick-up element and/or for the reception device,repeating all the preceding method steps for every possible transferposition of the first turning device, and controlling the positioning ofthe first turning device and/or of the reception device and/or of eachindividual first pick-up element during operation of thecomponent-handling device so that the deviation between the determinedand the defined position of the first pick-up elements and/or of thereception point is counteracted in every possible transfer position. 9.The method as claimed in claim 8, further comprising: detecting aposition of the first pick-up elements in relation to a previouslydefined reference point by means of a position and property sensor whichin particular is a camera sensor, and comparing the determined relativeposition of the first pick-up elements to the reception point and/or tothe ejection unit with the relative position of the first pick-upelements to the defined reference point, and repeating all the precedingmethod steps for every possible transfer position of the first turningdevice.
 10. The method as claimed in claim 8, wherein the electroniccomponents are transferred at a transfer point from the first adjustableturning device to a second adjustable turning device, and the receivedcomponents are turned by the second turning device through a secondpredetermined angle about their longitudinal or transverse axis, fed toa deposit point and deposited there on an adjustable reception device ata predetermined reception point, wherein the method comprises thefollowing further steps: detecting the deposit point, containing thefirst pick-up element of the first turning device situated at that pointand the second pick-up elements of the second turning device situated atthat point, from at least two detection directions which are differentfrom one another, by means of an adjustment sensor arrangement, anddetermining the position of the second pick-up elements of the secondturning device situated at the transfer point in relation to the firstpick-up elements of the first turning device situated at the transferpoint, and determining a deviation from a previously defined position ofthe second pick-up element, controlling the positioning of the secondturning device and/or of each individual first pick-up element duringoperation of the component-handling device so that the deviation betweenthe determined and the defined position of the second pick-up elementsis counteracted in every possible transfer position.
 11. The method asclaimed in claim 8, wherein a check of the detection quality of theadjustment sensor arrangement and/or a check of the first pick-upelements for damage is carried out on the basis of the comparisons.